Head-to-Head Comparison: EG 2001X & NXG

    EG2001X   NXG
Accuracy   Within 12 Microns / 0.5 mil (± microns)   Within 6 micons / ± 3
Wafer Size   3,4,5 and 6 inch   3,4,5,6 ( 8 and 12 inch coming soon )
Maximum X/Y Speed   250 mm (10") sec.   250 mm (10") sec.
       
Z Stage / Chuck        
Range   0.200"   0.200" (other configurations available)
Speed   15 ms / 0.020" stroke   11ms
Rotation   ± 10°   ± 10° ( 180° also available)
       
Loader (wafer handler)        
Cassette Capacity   2 Standard; 1 sender, 1 receiver   2 Standard; 1 sender, 1 receiver
Wafer Handling   belt and vacuum arm   belt and vacuum arm
Fine Alignment   CCD Image Processing   2 mega pixel digital CCD Camera
Hard Disk Drive   N/A   60 - 250 gig
Floppy Disk Drives   optional 3.5"; 2 drives   USB, Floppy, CD/RW, and DVD writer
Display   9" B & W   17" Color LCD
Power Consumption   Approx 1.5 KVA   Approx 1.5 KVA
       
Facilities Required        
Air   75 PSI @ 3 CFM   75 PSI @ 3 CFM
Vacuum   25 in/hg.   25 in/hg.
Dimensions   48"w x 32"d x 60"h (standard)   48"w x 32"d x 60"h (standard)
Weight   800 lbs.   700lbs.

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